Active Region Extent Assessment with X-rays (AREA-X)

Abstract The development of semiconductor sensors for new particle tracking detectors places increasing limits on sensor characteristics such as uniformity, size and shape inefficient areas active compared to inactive areas. Accurately assessing these relatively subtle effects requires either measurements in beams or the modification samples be used dedicated laser test setups. Active Region Extent Assessment with X-rays (AREA-X) has been developed an alternative method fast, efficient precise study area a sensor. It uses monochromatic, micro-focused X-ray beam 10–20 keV energy range provided by several synchrotron lines photo current induced measure depth responsive volume. can local inhomogeneities inefficiencies, overall extent volume its localised application, which makes need gather statistics over large unnecessary, allowing fast readout, enables studies behaviour at external parameters, e.g. temperature applied bias voltage. This paper presents measurement concept technical setup measurement, results from initial well capabilities limitations method.